薄膜金属ガラスを用いたマイクロ構造体の内部応力制御

Abstract

In order to apply the magnetostrictive materials to the sensor, the magnetostrictive materials are required to have a large magnetostriction and high relative permeability. We have studied the high throughput evaluation method using the MEMS device to search for materials having such characteristics. The MEMS device has a structure of the cantilever to measure the magnetostriction and relative permeability. However, it is difficult to measure magnetostrictive properties accurately because of a deflection of the cantilever. The purpose of this study is reduction of the deflection of the cantilever using internal stress relaxation of the thin film metallic glasses. We carried out heat treatment of Pd-Cu-Si deposited on a Si substrate. From the results, the conditions for internal stress relaxation of Pd-Cu-Si were searched. Using these conditions, heat treatment of the micro-structures consisted of Pd-Cu-Si and Fe-Ni-Cr was carried out. As a result, we succeeded in reducing the deflection of the micro-structures.