Abstract

Two inch diameter, 300 μm thick (BiGd)3(FeGaAl)5O12 films with a mirror surface were grown on {111} Nd3Ga5O12 substrates by liquid phase epitaxy. The extinction ratio was measured for a 30 × 18 mm2 specimen cut from a two inch diameter wafer. A ratio of 37 ± 3dB was obtained throughout the specimen. Several swirl patterns were observed at the periphery of the grown films. The swirl consists of a pit followed by a shallow groove, and was revealed to be caused by a shallow pit corresponding to the defect of NdGG substrate. Degradation of the extinction ratio was found at the pit of the swirl.

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