Abstract
Diffraction efficiency is critical for EUV multilayer gratings.To realize high diffraction efficiency,appropriate multilayer deposition method should be developed for grating substrates to ensure their groove shapes.The evolvement of groove shapes for laminar gratings during the deposition process was investigated.The results showed that the period number of the coating was a critical factor.To conserve groove shapes,period number should be selected appropriately for ultra shallow laminar gratings with depth of 2～5 nm.In the guideline of this principle,multilayer laminar grating with a diffraction efficiency of 22.1% at 14.65 nm on the-1 order was achieved,which exceeded all other results reported to date.
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