Abstract
We have succeeded in constructing AFM using an optical fibre and a lever. Our AFM has a silicon dioxide V-shaped microcantilever with sharper tip radius than a commercial pyramid shape one by the silicon processing techniques combined with newly realized not only anisotropic etching but iso-one Si(100) surfaces. One of other superior techniques is that the output laser power through the optical fibre is controlled to be constant within more or less 1.0% by use of AOM (acoustic optical modulator). We also try to observe AFM images of PMMA (polymethyl metha acrylate) gratings which is soft material and to discuss the image differences when we use both the bigger protrusion on the lever and the smaller one.
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