エキシマレーザーの中空導光路伝送

Abstract

As is well known, ordinary quartz fibers can not be used for power UV beams generated with excimer lasers. We have developed a technique for producing a UV-beam hollow light guide made of a aluminum and polymer compound. The hollow light guide provides a transmittance of 35%/m (KrF) and 50%/m (XeCl) at 0.5mm height of guide aperture. To enhance laser transmittance in delivery hollow light guide, the laser radiation should be polarized linearly. Also, the transmittance of a hollow light guide is determined by the degree of damage caused to the surface of an aluminum reflector installed at the end of guide's incident part. The transmittance and allowable maximum incident peak power depend on the height size of aperture. The flexibility loss of hollow light guide is due to the height size of aperture. For example, the short height size guide has a good flexibility and low flexibility loss, although the transmittance of the short height size guide is lower than long one.As a result of the experiments mentioned, the ultraviolet laser beam hollow light guide we propose will be able to be used in UV laser power delivery systems if its transmission power and transmittance are improved through increasing the reflectance of its aluminum surface.