Abstract
L10 ordering of FePt sputtered thin films was studied by using rapid thermal annealing (RTA). The volume of an L10 particle (V) was evaluated from the grain size by Scherrer's method. The coercivity (Hc) increases linearly with increasing V reaches 11 kOe at Vc (=1200 nm3), and becomes constant above Vc. The (001) crystal growth normal to the film plane is enhanced at an annealing condition where V is about 1000 nm3, a little lower than Vc. The crystalline growth mechanism and the correlation between Hc and V are discussed.
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