Abstract
Using ER fluids, it is possible to directly interface electric signals and fluid power without the need for mechanical moving parts. This study is aimed at achieving practical applications of ER fluids to micro fluid power systems, in particular to micro control valves (micro ER valves). In this paper, a three-port micro ER valve (12 x 12 x 12 mm) is proposed and devised, which has two pairs of electrodes connected in series. Static and dynamic characteristics of the micro ER valve are examined. The valve can control a load pressure change of 0.35 MPa at an electric field strength of 5 kV/mm. Using the micro ER valve, a small-sized one link manipulator is driven. Also two types of three-port ER valves such as electrode-electrode type and orifice-electrode type are discussed with mathematical models.
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