Abstract
We have developed cantilever-based strain sensors which can be used in the pressure measurement of compressed air. The cantilever beam's distortion due to compressed air blowing is detected by strain sensor located at the fixed end of the cantilever. We evaluated the output characteristics, blowing high-pressure N2 gas to the cantilever sensor. The sensor outputs clearly depended on the N2 gas pressure, the distance between the sensor and the nozzle, and N2 gas blowing position. As a result, we confirmed that our sensors can be applied to the pressure measurement of the compressed air.
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