Abstract
Shadow moiré method is useful to measure height distribution of a flat object with high accuracy because it can use a fine grating by setting the grating near the object. By combining with a phase shifting method, it is quantitatively analyzable with high accuracy. In this study, the authors propose a new phase-shifting shadow moiré method using light-source-stepping method with LED light sources. The phase-shifting can be performed at high speed by changing the electrical on/off switches of the LED light sources because of no use of movable parts. The accuracy is 3μm in a 90mmx90mm area. The theory and experimental results are shown.
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