超声波轴承用挤压式压电换能器的共振频率

Abstract

A new type radial extrusion type piezoelectric transducer for ultrasonic levitation bearings was designed to verify the correctness of the theoretical calculation of ultrasonic bearing radial resonance frequency.Based on the basic theory of elastic,piezoelectric equation,and the electromechanical analogy principle,the mechanical and electrical equivalent circuit diagram for the piezoelectric transducer was established,and the resonance frequency equation of the radial vibration of the piezoelectric transducer was deduced.Then,MATLAB software was applied to calculation of the resonant frequency of piezoelectric transducer,and the finite element software was used to analyze the modal of the known structure size of transducer,calculate the resonance frequency of the piezoelectric transducer under the required vibration mode and simulate and analyze the impact oftransducer structure size on resonance frequency and radial amplitude of the transducer.A prototype was designed and its resonant frequency was verified on the basis of theory,simulations and experiments.Result shows that the relative errors of theoretical and experimental results and simulation and experiment results for the radial vibration resonance frequency are 5.89%,and3.53%,respectively.These results verify the correctness of the theoretical calculation method and provide theoretical basis for the design of extruded piezoelectric transducers.