Abstract

Tetramethylammonium hydroxide (TMAH) is a relatively strong base among organic compounds, and decomposes at 130-140°C into gaseous substances (Me3N, Me2O, MeOH, and H2O). TMAH has been prepared by alkali treatment of tetramethylammonium chloride (TMAC) obtainable from trimethylamine and methyl chloride, but use is made recently of developer electrolysis of TMAC in the presence of ion exchange membrane. The latter method gives rise to a highly pure TMAH aqueous solution free from chloride anions. TMAH currently finds some utilities in the production of highly functional materials such as developer for positive-working photoresist and the surface treatment of fibers, glasses, and plastics, and also as reagent for the methyl esterification of fatty acids and phospholipids, reagent for organic synthesis and preparation of catalysts, etc.

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