Abstract
This paper describes the real-time measurement of in-plane vibration using a laser speckle interferometer with the double-aperture method. To detect the in-plane vibration in real-time, a new data processing system with an analog electronic circuit for calculating Fourier coefficients is proposed. The phase angle of the frequency component of interference fringes, which corresponds to the in-plane displacement of a target irradiated by a laser, is directly detected. The measurement system composed of the proposed data processing system and the laser speckle interferometer was applied to measure the in-plane vibration of a target excited by a piezoelectric actuator; the vibration displacement of about 5μm was detected with a sampling frequency of 470Hz and within a measuring error of ±0.5μm.
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