任意相移最小二乘法迭代的在线三维检测

Abstract

An on-line Phase Measuring Profilometry(PMP)based on least-square iteration was proposed to simplify the complexities of system installment and to avoid the influence of additional phase ?shifting caused by the non-parallelism between grating lines and object's displacement in the PMP based on synchronous detection.In measurement processing,the sinusoidal grating with arbitrary grid line direction was projected onto an object,and a CCD was used to capture the deformed fringe patterns.After pixel matching,fringe patterns were used to evaluate the phase distribution.The phase-shifting was determined as arbitrary values by both projection system and object's displacement.Finally,the least-square iteration was used to calculate the phases.The experiment result shows when the grating line directions on the reference plane are changed,the measurement resultsare stable,and the root-mean-square error is less than 0.169 9mm.It concludes that the proposed method relaxes the restriction of the spatial location of measurement equipment,increases the measurement flexibility and makes the PMP more applicable.