Abstract
Ultraviolet curable material SU-8 2005 and thermal crosslinked polymer Methyl Methacrylatel Glycidyl Methacrylate[P(MMA-GMA)] are used as the core and the cladding layer materials,respectively,and a novel high-order Bragg waveguide grating filter with a thickness of 5 μm,a width of 9 μm and a grating height of 4 μm is successfully designed and fabricated by direct photolithography technique.The characteristic parameters including resonance wavelength and transmissivity are carefully simulated.The performance parameters of fabricated device are measured to obtain the resonance wavelength of 1 550.4 nm,the extinction ratio of 23 dB and the 3-dB bandwidth of 2 nm.
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