Abstract
Excimer lasers are expected to be useful for several medical applications, such as the laser angioplasty and the keratoplasty, because of ultraviolet, high peak power pulse lasers. Kinds of the commercially available excimer lasers are XeCl lasers (wavelength: 30 8nm), KrF lasers (248nm) and ArF lasers (193nm). In case of XeCl lasers, the longest gas lifetime (>107 shots), the highest repetition rate(>1kHz) and the longest pulse width(>100ns) are obtainable, among these three excimer lasers. KrF lasers have the shortest wavelength at which the quartz are applicable for optics without degradation. ArF lasers are usable shortest wavelength lasers among all commercially available lasers, in vacuum ultraviolet region.For a national project (AMMTRA project) until 1993, several kinds of excimer lasers with the highest performance are developed. Also, highly reliable KrF lasers with narrow spectrum width, are developed markedly as the micro-lithography light sources for next generation LSI.It is believed that excimer lasers, which come into real use in the medical application field, will be realized by technologies obtained from such developments.
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