Abstract
This development paper describes the optical measurement system of diametral dimension by parallel scanning of a laser beam. The measure is taken by counting the synchronous pulses with the scanning position of the beam. The pulse signal is generated with a linear scale composed of the optical slits at an equal space on the rotational scanning unit. Therefore a high-precision constant speed motor and fundamental optical components such as a scanning polygon mirror and an Fθ lens fall into disuse. Its compact size and omission of complicated electronic circuits for time-consuming calculation are also strong points of the developed measurement system.
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