Abstract
A new compensation method for X-ray photoemission has been developed to reduce the low-pressure limit of a hot-cathode ionization gauge. The negative biased compensation grid is located between an electron collector grid and an ion collector plate, and compensates the X-ray photoemission from the ion-collector by the X-ray photoemission from the compensation grid. The test gauge is constructed with a molybdenum spherical grid, a Th02-Re ring filament, a disk ion collector and a woven-mesh compensation grid. The X-ray limit of the new gauge with a sensitivity factor of 0.2Pa-1 is about 10-11Pa. However, the gauge is influenced considerably by the electron-stimulated ion desorption from the grid.
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