Abstract
The hybrid-integration of electro-mechanical components and opto-electronic devices have been designed and put through initial trial tests. The beam scanning unit, which guides the laser beam by tilting a micro-mirror prism with a piezoelectric actuator, has been fabricated and its basic performance has been confirmed. By applying 300Vp-p sinusoidal signal to the piezoelectric device, the laser beam scanning function has been stable up to 1kHz. The result suggests that it is possible to use the laser beam scanning function to control the optical spot's high-speed fine tracking.
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