Abstract
This paper describes a computer generated hologram (CGH) on a curved surface for laser machining. The CGH fabricated on a parabolic copper mirror converts a 14mm diameter Gaussian beam of a CO 2 laser into a shaped beam whose intensity distribution is uniform (4mm) in x direction and gaussian (1mm) in y direction. The binary CGH pattern was drawn by a laser direct writing machine with a focus servo mechanism. To obtain an accurate step height of CGH pattern, a palladium thin film was placed between the copper mirror and a plated copper layer 3.75μm thick. While the plated layer was etched by a ferric chloride solution, the palladium film prevented the substrate mirror from being etched. The beam shaping by the fabricated CGH was demonstrated experimentally with a low power CO 2 laser and an infrared-camera.
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