Abstract
This paper considers of the high responsiveness of pneumatic servo stage in a vacuum environment. This pneumatic servo stage is widely recognized as the leading candidate for the Electron Beam mask writing stage among the major company in the field. In order to meet their further requirement, high responsiveness is one of the crucial issues. However, there is an obstructive factor caused by a pipe resonance which depends on the pipe between the stage and the servo valve. Then, firstly the 5th order system controller is instructed. Although, the results are improved theoretically they are deteriorated due to a phase lag of feedback signal when considering actual environment in which feedback signal is made by differentiating position signal. Then, to achieve the high responsiveness, phase lead compensation is employed for the system. In the actual experiments, the effect of the phase lead compensation is confirmed. Furthermore, the triple phase lead compensation is applied, because there is multiple feedbacks in the control of the pneumatic servo stage. The result of the frequency response is shown that the effect of the multiple phase lead compensation is higher than the one of a single phase lead compensation.
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