Abstract
应用于投影光刻离轴照明的自由曲面设计
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https://doi.org/10.3788/aos201131.0322002
Journal: Acta Optica Sinica | Publication Date: Jan 1, 2011 |
Citations: 2 |
应用于投影光刻离轴照明的自由曲面设计
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