Abstract
Temperature-sensitive magnetic cores and thick films have previously been fabricated for thermal sensors. These magnetic substances are suitable for large instruments, but cannot be adapted for miniaturization. A emperaturesensitive magnetic thin-film sensor (MFS) was made by sputtering and annealing a Mn-Zn ferrite magnetic core with low-Curie-temperature. The thickness ranged from 0.8 to 1.2μm. Magnetic properties were acquired by means of an annealing process. The magnetic characteristics of the MFS have a marked temperature dependence, like those of a bulk core or a thick-film. The magnetization at 10°C is 30% of that at 50°C. The MFS has a quick thermal response and can be used as a micro-temperature sensor, a thermomagnetic transducer, and a light-magnetic converter.
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