Abstract
This paper describes a novel phase-shifting point diffraction interferometer (PS-PDI) that employs 2 fiber-optic point sources, as a tool for measuring surfaces for SOR and EUV mirrors with sub-nanometer accuracy using visible light optics. In conventional interferometry, the figure accuracy of the reference surface determines the measurement accuracy. We therefore need an absolute reference surface with sub-nanometer accuracy. One of the qualified surfraces is a spherical wavefront which comes from point light source. The proposed PS-PDI system uses 2 single-mode optical fibers as point light sources. The system is applied to the measurement of a commercial spherical concave mirror with 500 mm in radius of curvature and 30 mm in diameter. The repeatability of measurement for the mirror is estimated to be about 3 nm in peak-to-valley value at the wavelength of 632.8 nm in He-Ne laser.
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