Abstract
Nanosensors are generally integrated into flexure translation stages to form a closed-loop feedback to control the movement of the stage accurately in a nano-scale order.To evaluate the displacement of nano-stages,a calibration system based on a single frequency triple-beam laser homodyne interferometer with a sub-nanometre resolution was developed to calibrate the precision of the linear nano-stage with a capacitive feedback sensor.The triple-beam configuration and its linear and angular measuring principles were described to reflect how the linear and angular displacements(yaw pitch) of the stage could be determined accurately.The experimental results demonstrate that the system is capable of calibrating the nano-stage with a linear displacement up to 320 μm and an angular deviation up to 3.5″.The error sources of the proposed calibration system were also highlighted in the measurement uncertainty analysis,and it shows that the expanded uncertainty of measurement with a coverage factor k=2 is estimated as(1.8+1.23×10-2 L) nm,where L is the displacement in μm.The results demonstrate that the proposed system can evaluate the movement performance of nano-stages efficiently.
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