Abstract
Deep Level Transient Spectroscopy (DLTS) is a technique used to identify and characterize deep defects in materials. New kind of setups using impedance analysers are developed over capacitance bridges. The impedance analyser from Zurich Instruments MFIA has gained significant interest due to its versality, availability and relatively low cost of the device. Consequently, the need for a software utilizing this device for the DLTS measurements has emerged. In this work, we present LabVIEW based software for DLTS using the MFIA impedance analyser. The most significant characteristics of the application include great functionality, effortless customization, and user-friendly interface.
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