Abstract
The paper proposed a mutual inductive magnetic sensor composed of a pair of parallel winding spiral coplanar coils sandwiched by soft magnetic ribbons. Because the layout of coils is in a single individual layer, the gap between the magnetic ribbons up and down is decreased compared with the previous multilayer laminated magnetic sensor. Therefore, the magnetic leakage is ameliorated, and the electromagnetic coupling between the coils and ribbons is strengthened, which in turn enhances the sensitivity. The magnetic sensor can provide a sensitivity of 5.73 mV/Oe at an excitation frequency of 500 kHz, exhibiting an enhancement of 5 times relative to the multilayer laminated sensor. In addition, the resolution of the magnetic sensor is 0.18 nT. More importantly, the structure is particularly suitable for micromachining, providing the possibility for manufacturing high-performance micro-magnetic sensors with simpler planar technology.
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