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Abstract
Giant magnetostrictive thin films of both the binary compound TbxFe1−x and the ternary compound (TbyDy1−y)xFe1−x have been prepared by multitarget magnetron sputtering in wide compositional ranges. In view of their potential use as actuators in microsystem technology the research was focused on low-field magnetostrictive properties in connection with low coercivity. Giant magnetostriction was found for a range of compositions with Tb contents higher than those of the crystalline Tb-Fe compounds. Depending on the composition, amorphous films with a magnetostriction as large as λ≊450×10−6 at an applied field of 6 kOe and a coercive field Hc<10 Oe could be prepared. The improvement of the low-field magnetostriction of the ternary alloy Tb-Dy-Fe in comparison to Tb-Fe was found to be less distinct than for crystalline materials, probably because all reported films showed a perpendicular easy axis. The amorphous state of the films are stable at least up to 300 °C.
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