Abstract
The quantitative interpretation of scanning Auger electron microscope (SAM) images has been shown to require the use of multi-spectral imaging of the surface under study. In a multi-spectral analytical microscope (MULSAM) a set of maps (bands) is acquired from the same area of a sample using scattered electrons with different kinetic energies as well as other signals from the sample such as current flowing to ground, the conventional SEM signal and characteristic x-rays. The resulting set of bands is a multi-spectral image which can be processed using models of the electron scattering in the sample and statistical transforms well known in LANDSAT imaging technology. The processed images can separate the mixed effects of topography, surface chemical inhomogeneity and bulk chemical composition fluctuations occurring in the bands of raw data.A computer controlled, UHV, energy analysing, scanning electron SEM will be described in this paper. The microscope contains facilities for collecting up to 23 256 by 256 pixel image bands from the same area of the sample.
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