Abstract

We present a metasurface-integrated Si 2-D CMOS sensor array for multispectral and polarimetric photodetection applications. The demonstrated sensor is based on the polarization selective extraordinary optical transmission from periodic subwavelength nanostructures, acting as artificial atoms, known as meta-atoms. The meta-atoms were created by patterning periodic rectangular apertures that support optical resonance at the designed spectral bands. By spatially separating meta-atom clusters with different lattice constants and orientations, the demonstrated metasurface can convert the polarization and spectral information of an optical input into a 2-D intensity pattern. As a proof-of-concept experiment, we measured the linear components of the Stokes parameters directly from captured images using a CMOS camera at four spectral bands. Compared to existing multispectral polarimetric sensors, the demonstrated metasurface-integrated CMOS system is compact and does not require any moving components, offering great potential for advanced photodetection applications.

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