Abstract

A novel compliant z-stage is applied for positioning and indenting a specimen in nano/microindentation testing system. For an excellent operation, the proposed z-stage can concurrently satisfy multicriteria comprising high safety factor, small parasitic motion, and large output displacement. The key aims of this article are to present a novel design of the compliant z-stage as well as an effective integration methodology of Taguchi method, response surface method, weight factor calculation based on signal to noise, and the whale optimization algorithm to resolve a design optimal problem so as to enrich the quality performances of the proposed stage. Primarily, the z-stage is designed based on four-lever amplifier, compliant hinge shifted arrangement mechanism, zigzag-based flexure spring guiding mechanism, and symmetric six leaf hinges-based parallel guiding mechanism. Secondly, the number experiment data are achieved by the Taguchi method and finite element analysis. Subsequently, the regression functions among input variables and quality characteristics are formed by exploiting response surface method. In addition, the weight factors for every characteristic are defined. Additionally, the sensitivity analysis is accomplished for determining influences of input variables on quality responses. Ultimately, based on regression equations, the whale optimization algorithm is executed to define the optimal factors. The consequences indicated that the output deformation is about 454.55 μm and the safety factor is around 2.38. Furthermore, the errors among the optimal consequences and the confirmations for the safety factor and output deformation are 7.12% and 4.25%, correspondingly. By using Wilcoxon and Friedman methods, the results revealed that the proposed algorithm is better than the cuckoo search algorithm. Based on the quality convergence characteristics of hybrid approach, the proposed method is proficient for resolving complicated multiobjective optimization.

Highlights

  • Nano/microindentation testing technique has been utilized for supplying small displacement or force for measuring the depth in the nano/microratio quality characteristics of material specimen. is technology is utilized to monitor mechanical features of various materials [1, 2]

  • Accurate positioning platforms are inherited from quality characteristic benefits of the compliant mechanism, and they are widely utilized for potential applications such as constantforce precision positioning [6], ultra-violet nanoimprint lithography [7], atomic force microscopy [8], and positioning system for cell micromanipulation [9]

  • The z-axis output displacement as well as safety factor of the proposed z-stage was retrieved based on finite element analysis (FEA) in Ansys software

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Summary

Introduction

Nano/microindentation testing technique has been utilized for supplying small displacement or force for measuring the depth in the nano/microratio quality characteristics of material specimen. is technology is utilized to monitor mechanical features of various materials [1, 2]. In order to balance and achieve the desires of a large output deformation as well as a high safety factor, simultaneously, the hybrid method is proposed for conducting the optimal problem. An integration method of TM, RSM [48], and whale optimization algorithm (WOA) integrated the weight factor calculation method based on the signal to noise for optimizing a compliant z-stage applied for the indenter in nanoindentation tester which has not been studied yet. As a result, based on the global convergence quality characteristics of the WOA, a proficient hybrid approach of TM, RSM, and WOA [18, 49,50,51,52] is developed to resolve multicriteria optimization trouble of the z-stage in this article. A few statistical analysis [54] is executed for evaluating the manners of the proposed algorithm with another approach

Conceptual Design of Compliant Z-Stage
Methodology
Results and Discussion
Full Text
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