Abstract

In this Letter, we experimentally demonstrate a monolithic integration of two vertically rolled-up microtube resonators (VRUMs) on polymer-based 1×5 multimode interference waveguides to achieve 3D multi-channel coupling. In this configuration, different sets of resonant modes are simultaneously excited at S-, C-, and L- telecom bands, demonstrating an on-chip multiplexing, based on a vertical-coupling configuration. Moreover, the resonant wavelength tuning and consequently the overlapping of resonant modes are accomplished via covering the integrated VRUMs by liquid. A maximum sensitivity of 330nm/refractive index unit is achieved. The present work would be a critical step for the realization of massively parallel optofluidic sensors with higher sensitivity and flexibility for signal processing, particularly in a 3D-integrated photonic chip.

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