Abstract

We simulated an efficient method for the sensor array of high-sensitivity single-slot photonic crystal nanobeam cavities (PCNCs) on a silicon platform. With the combination of a well-designed photonic crystal waveguide (PhCW) filter and an elaborate single-slot PCNC, a specific high-order resonant mode was filtered for sensing. A 1 × 3 beam splitter carefully established was implemented to split channels and integrate three sensors to realize microarrays. By applying the three-dimensional finite-difference-time-domain (3D-FDTD) method, the sensitivities calculated were S1 = 492 nm/RIU, S2 = 244 nm/RIU, and S3 = 552 nm/RIU, respectively. To the best of our knowledge, this is the first multiplexing design in which each sensor cite features such a high sensitivity simultaneously.

Highlights

  • Label-free optical sensors have recently garnered increasing interest for high-performance quantitative measurements without labeling heterogeneity introduced by fluorescent techniques

  • 235 nm/RIU based on an infiltrated high-Q slot photonic crystal cavity, but this sensor possessed a large footprint so that it was not suited to large-scale integration

  • We demonstrate here that the interaction [23,26], which contributes to high sensitivity

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Summary

Introduction

Label-free optical sensors have recently garnered increasing interest for high-performance quantitative measurements without labeling heterogeneity introduced by fluorescent techniques. The authors of [6] presented a sensor array based on five one-dimensional (1D) photonic crystal nanobeam, the maximum sensitivity was only 130 nm/RIU. Yang et al [21,22] demonstrated the nanoscale PhC sensors array on monolithic substrates based on a side-coupled resonant cavity array on silicon, and the sensitivities were approximately 160 nm/RIU. 235 nm/RIU based on an infiltrated high-Q slot photonic crystal cavity, but this sensor possessed a large footprint so that it was not suited to large-scale integration. Order to realize a thereof high-sensitivity sensor array, the parallel connection of single-slot PhC. In order to realize a high-sensitivity sensor array, the parallel connection of single-slot nanobeam cavity (PCNC) sensors was simulated. PCNC and the transmission lattice constant (a) of PhCW, three distinguished high-order resonant peaks peaks of appeared in the spectrum.

The 1 ˆ 3 PhC Beam Splitter Design
As shown in
Steady-state
Three-dimensional
Design
Schematics
Transmission
Bandpass
Multiplexing
Multiplexing Sensor Array Design
10. Schematic
Conclusions
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