Abstract
Phase-shifting interferometry is widely used for high-precision surface measurements, but has difficulty in dealing with parallel optical plates. In this paper, an advanced method is proposed to simultaneously measure surface distributions of parallel optical plates from multiple surface interference fringes. The basic theory behind the technique is by applying wavelength-modulated phase shifting interferometry (WMPSI) to get enough frames of multiple surface interference fringes. In the procession of wavelength-modulated phase shifting, the phase variation for one point of the surface is traced and is processed by Fourier transform, and then the frequency spectrum of every surface can be separated from each other. Therefore, it allows extraction of front surface, back surface and thickness variation from multiple surface interference fringes with high precision.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Optik - International Journal for Light and Electron Optics
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
