Abstract
Multiple scattering strongly affects the depth resolution of Elastic Recoil Detection (ERD) experiments in contrast to its small effects in typical Rutherford Backscattering Spectrometry (RBS) measurements. A comparison of experimental ERD and RBS results shows substantial differences in the depth resolution of these two techniques. The effect of multiple scattering is estimated by computer simulations and is compared to experimental results. The effect of sample material is also discussed and it is shown that in high Z materials multiple scattering is dominant and the depth resolution of ERD is often comparable to the measured structure thickness. The effects reported in this paper are of a general nature and are applicable to all ERD type analysis including He and heavy ion ERD and all kind of detection systems.
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