Abstract

A multiple probe technique is described for the accurate measurement of the retarding potential characteristics of probes in high-frequency electrodeless plasmas. Earlier multiple probe methods are discussed along with their advantages, assumptions, and limitations. The improved triple probe technique, developed for diagnostic measurements in plasma lasers, allows the complete probe characteristic to be traced rapidly. From the retarding potential characteristic for the electrons, the electron temperature and density can be determined for the low-energy electrons, together with the electron energy distribution function.

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