Abstract
Quantifying the nanoscale force between the atomic force microscopy (AFM) probe of a force-sensing cantilever and the sample is one of the challenges faced by AFM researchers. The normal force calibration is straightforward; however, the lateral force is complicated due to the twisting motion of the cantilever. Force measurement in a liquid environment is often needed for biological applications; however, calibrating the force of the AFM probes for those applications is more difficult owing to the limitations of conventional calibration methods. In this work, an accurate nondestructive lateral force calibration method using multiple pivot loading was proposed for liquid environment. The torque sensitivity at the location of the integrated probe was extrapolated based on accurately measured torque sensitivities across the cantilever width along a few cantilever lengths. The uncertainty of the torque sensitivity at the location of the integrated tip was about 13%, which is significantly smaller than those for other calibration methods in a liquid environment.
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