Abstract
We have studied multiple ionization of rare gas atoms (Ne, Ar, Kr, Xe) by intense 51 nm and 61 nm radiation delivered by the EUV-FEL at SPring-8 Compact SASE Source (SCSS) Test Accelerator. Charge states as high as Ar7+ and Kr8+ have been observed. We present intensity dependent yields of multiply charged ions providing benchmark data for theory, and discuss the role of direct, sequential and resonant ionization channels.
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