Multiple fano resonances based on all-dielectric metastructure for refractive index sensing

Abstract

We investigate an optical refractive index sensor based on an all-dielectric metastructure in the near-infrared regime for achieving high sensitivity and high quality factor (Q-factor). By introducing the asymmetry in the metastructure, four sharp Fano resonances with high Q-factor are generated owing to the transition from symmetry-protected bound states in the continuum (BIC) to quasi-BIC, and the magnetic quadrupole (MQ) resonance, magnetic dipole (MD) resonance, and toroidal dipole (TD) resonance are analyzed by a combination of the field distributions. By evaluating the sensing performance with finite difference time domain (FDTD), the highest Q-factor can reach 6900, the modulation depth is close to 100 %, the sensitivity can reach 288 nm/RIU, and the figure of merit (FOM) is 888 RIU−1. Furthermore, the sensor is prepared using electron beam lithography (EBL), and inductively coupled plasma reactive ion etch (ICP-RIE), and high sensitivity is achieved in liquids with different refractive indices in the near-infrared. The results show a good sensing performance of the designed metastructure. Our findings will give access to the development of applications in non-linear devices, narrow-band filters, optical switches, and quantum nanophotonics.