Multiple attenuated total internal reflection spectra of ultrathin titanium oxide layers synthesized on a germanium surface

Abstract

We have realized a vacuum variant for recording the multiple attenuated total internal reflection spectra of ultrathin (2–30 nm) layers of titanium dioxide directly over the course of their synthesis by the molecular lamination method on the surface of germanium single crystals. To a first approximation, there is a linear relationship between the intensity of the bands of the doublet at 890 and 820 cm−1 (respectivelyvas andvs(Ti − O) and the number of molecular lamination cycles (thickness of the synthesized layers); deviations from linearity are due to the effects of the substrate and are expressed in changes in the shape of the contour of the doubletvas/vs for thicknesses 20 nm) of the titanium dioxide layer is due to the content of adsorbed H2O and HCl molecules in the layer, desorption of which when the samples are heated leads to denser packing of the synthesized layers.