Multiphysics Base of Modelling of the MEMS Micromirror and Simulation by Modal Control

Abstract

This paper presents the introduction of a method for optical design, modelling and simulation of a three-dimensional microelectromechanical system (3D MEMS) based on a photonic cross-connect. The 3D MEMS switch fabric architecture based on highly reactive micromirrors is ideal for switches with large and medium ports of counts. Due to this reason, it is necessary to provide responsive closed-loop control to position the mirrors accurately representing optimization of control by an advantage of the 3D optical MEMS. In optimization of control of 3D MEMS technologies, the position control utilizing an optical feedback is not capable of correcting shocks, vibrations and other instabilities. The forwarded 3D MEMS closed-loop control technology employs integrated position-sensing electronics in a closed-loop control system of a position of micromirrors and maintains stability. Simulation results of modal control represent a chosen position of a micromirror depending on capacity changes between the micromirror and the electrodes. The paper presents closed-loop control, as well as multi-physical modelling and simulation of a double-gimbaled MEMS-based cross-connect. Moreover, the case study including simulation and optimization of micromirror tilting is also given. Possibilities of applying the presented optimization of closed-loop control are straightforward, and they are able to improve dynamic behaviour of micromirrors significantly.