Abstract
Miniature, all-silica, fiber-optic sensors capable of independent measurement of at least two different parameters are presented. Sensors were produced by a micromachining process based on the selective etching of specially designed phosphorousdoped optical fibers and an assembly-procedure that included fiber cleaving, fiber splicing and etching of fiber-micro-assemblies. Furthermore, an efficient method for independent readout of parameters in sensors that are composed of multiple resonators was also developed. The method utilizes a discrete Furrier transform of sensor’s optical spectrum and allows for simultaneous, crosstalk-free and highly sensitive readout of individual resonators’ path length changes.
Highlights
Optical fiber-based sensors have received a great deal of attention over the past several decades for increased sensitivity over existing techniques, geometric versatility, immunity to harsh environments, and inherent compatibility with optical fiber communication systems
We have shown that the total reflected-light intensity IR of Fabry-Perot interferometer (FPI) with three semi-reflective surfaces can be described as a linear superposition of three cosine spectral components with distinctive spectral frequencies, which are determined by the length of the resonator, the refractive index (RI) of the transmission medium and the wavelength of light
High measurement resolutions better than 0.1 mBar and 2x10-5 refractive index unit (RIU) can be achieved by using spectral interrogation and a discrete Furrier transform (DFT)-based measurement algorithm
Summary
Optical fiber-based sensors have received a great deal of attention over the past several decades for increased sensitivity over existing techniques, geometric versatility, immunity to harsh environments, and inherent compatibility with optical fiber communication systems. The rising complexity of sensor systems, methods often require sensing of more than one physical or chemical parameter. Multi-parameter fiber-optic sensors that monitor physical, chemical, and biological parameters are of great importance in numerous areas including structural health monitoring, environmental pollution control, biochemical and biomedical applications [1,2,3,4]. There are some other techniques involving multicore fibers, that have high potential for multiparameter sensing [11]. In this paper we present all-silica multiparameter miniature fiber-optic Fabry-Perot (FP) sensors for measuring at least two parameters simultaneously. We successfully demonstrated simultaneous measurement up to four very different physical parameters. The method base on discrete Furrier transform of sensor’s back reflected optical spectrum that allows simultaneous, crostallk-free and highly sensitive measurements of resonators’ path length change
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