Abstract
We present the potential realization of multiline optical filters by the integration of different periodic gratings, which are implemented on an HfO₂-on-silicon platform. Supporting arms are used to manage the relief of residual stress to obtain freestanding HfO₂ gratings. The spectral properties are calculated by the rigorous coupled wave analysis method and measured by angular-resolved microreflectance. Multiple symmetric double resonances occur at the normal incidence, and asymmetric double resonances, which are attributed to the superposition of guided-mode resonances caused by different periodic gratings, are clearly observed under the off-normal incidence. The experimental results indicate that our proposed grating structures are promising for the realization of multiline filters.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
