Abstract
We present the potential realization of multiline optical filters by the integration of different periodic gratings, which are implemented on an HfO₂-on-silicon platform. Supporting arms are used to manage the relief of residual stress to obtain freestanding HfO₂ gratings. The spectral properties are calculated by the rigorous coupled wave analysis method and measured by angular-resolved microreflectance. Multiple symmetric double resonances occur at the normal incidence, and asymmetric double resonances, which are attributed to the superposition of guided-mode resonances caused by different periodic gratings, are clearly observed under the off-normal incidence. The experimental results indicate that our proposed grating structures are promising for the realization of multiline filters.
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