Abstract
A microdroplet ejector actuated by the shear mode PZT actuator is proposed. It consists of three electroforming components including a vibration plate, a chamber plate and a nozzle plate. The three components are fabricated by nickel electroforming technology and assembled by aligning apparatus using epoxy adhesive. The AZ-type thick positive photoresist is used as the electroforming mould, which is patterned by UV lithography. The repeat steps including the photoresist patterning and nickel electroforming make the component form a quasi 3D (or 2.5D) multilevel microstructure. The vibration plate has the feature of two different sized bulges piled on the diaphragm. Those nozzles in the nozzle plate are formed by the nickel lateral deposition when depositing over columnar photoresist moulds.
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