Abstract

Multilayered alloy films composed of non-nitride and nitride layers were prepared by N 2 reactive sputtering. Soft magnetic properties were obtained for the films comprising metal-metal elements such as Co-Nb-Zr/Co-Nb-Zr-N when the layer thickness is less than 30 nm and for the films comprising metal-metalloid elements such as Fe-Nb-B/Fe-Nb-B-N when it is less than 60nm. The films showed high 4π M s (12–17kG) and a high permeability (2000–4000 at 1 MHz) after magnetic field annealing at 400–700°C. Magnetic VCR heads manufactured with Co-based multilayered films showed extremely high efficiency both in recording and reproducing characteristics.

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