Multilayer TiBe interference structures for ultrasoft X-ray radiation prepared by pulsed laser sputtering

Abstract

This paper is concerned with the properties of multilayer TiBe interference structures in the ultrasoft X-ray region. The structures were prepared by pulsed laser sputtering with a radiation power density at the target Q= 0.2−1 GW/cm 2. It is shown that the angular dependences of the reflection coefficients measured at wavelengths λ = 114 A ̊ ( Be K α ) and λ = 1.54 A ̊ ( Cu K α ) are described well by the theoretical dependences calculated using the atomic scattering factors from ref. [2]. The value of the reflection coefficient reaches 40% at λ = 114 A ̊ .