Multilayer Piezoelectric Ceramic Vibrator with Internal Electrodes

Abstract

Multilayer piezoelectric vibrators made from high mechanical quality factor (Q m) PbZrTiO3 ceramic material with internal electrodes have been investigated for application to ultrasonic devices. The existence of internal electrodes activates the ceramic sintering reaction and as a result, cofiring of the the multilayer vibrator at a lower temperature becomes possible. Multilayer vibrators with 2-9 layers of internal electrodes were fabricated, and evaluated. The values of Q m>1500 and k31=0.36 can be obtained. It was found that high-power ultrasonic devices driven by low voltages.