Abstract
X-ray microscopy is a successful technique with applications in several key fields. Fresnel zone plates (FZPs) have been the optical elements driving its success, especially in the soft X-ray range. However, focusing of hard X-rays via FZPs remains a challenge. It is demonstrated here, that two multilayer type FZPs, delivered from the same multilayer deposit, focus both hard and soft X-rays with high fidelity. The results prove that these lenses can achieve at least 21 nm half-pitch resolution at 1.2 keV demonstrated by direct imaging, and sub-30 nm FWHM (full-pitch) resolution at 7.9 keV, deduced from autocorrelation analysis. Reported FZPs had more than 10% diffraction efficiency near 1.5 keV.
Highlights
X-ray microscopy brings new insights to materials researchers from different fields by adding either a 3rd spatial [1,2] or a temporal [3,4] dimension to materials analysis, both at very high resolution
The results prove that these lenses can achieve at least 21 nm half-pitch resolution at 1.2 keV demonstrated by direct imaging, and sub-30 nm full width at half maximum (FWHM) resolution at 7.9 keV, deduced from autocorrelation analysis
The fabrication process is intrinsically capable of delivering Fresnel zone plates (FZPs) with high efficiency imaging performance at both soft and hard X-rays
Summary
X-ray microscopy brings new insights to materials researchers from different fields by adding either a 3rd spatial [1,2] or a temporal [3,4] dimension to materials analysis, both at very high resolution. The width of the outermost zone, Δr, defines its full-pitch resolution at 1st diffraction order, δRayleigh = 1.22Δr according to the Rayleigh criterion [10] Another important property of FZPs is their diffraction efficiency, DE, which is a function of the energy dependent complex refractive index and the FZP thickness [11] while in certain cases Δr can have an important impact on the DE (especially for small Δr and large aspect ratio, Ar) [12,13]. Along with the results of the autocorrelation analysis of HXR experiments, the direct imaging results at the SXR range, confirm the functionality of the fabricated ML-FZP for high energies demonstrating the highest resolution imaging ever achieved by a multilayer type Fresnel zone plate
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