Multilayer Flexible SU8-Gold Microelectrode Arrays for Wearable Bioelectronics

Abstract

Wearable health trackers for vital signs monitoring are becoming ever more important especially due to the global coronavirus pandemic (COVID-19) caused by the SARS‑CoV‑2 virus which severely affect the respiratory system and can cause cardiac manifestations. Particularly, wearable solutions which can seamlessly monitor heart activity are critical to facilitate personal preventive and remote healthcare, as well as to allow early diagnosis of cardiac dysfunctions. A fundamental enabler of wearable bioelectronics is the sensing bioelectrode which is used to record surface biopotentials. While a plethora of attempts have been reported to realize skin-conformal dry electrodes and electronic skin patches, oftentimes a very critical aspect of the electrode i.e., the actual electrical interfacing of the wearable electrode to readout circuits without disturbing the skin-electrode contact, is overlooked. To address this issue, this paper reports a unique tri-layer, polymer-metal-polymer skin-conformal microelectrode design with sidewall metal coating to achieve vertical interconnect accesses (VIAs) and realize contact pads for external interfacing. The novel and optimized process flow reported herein allows repeatable fabrication of flexible electrodes in arrayed format with yields exceeding 90%. Functionality of the microfabricated electrodes were demonstrated by successful acquisition of the electrocardiogram in lead-I configuration with clear detection of the P-QRS-T complex.