Abstract
A multilayer coating of Mo∕Si is usually used for space science in the spectral range of extreme ultraviolet, especially for He-II (30.4nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15%–20% is achieved. But the space science community needs a higher reflective coating at 30.4nm for the future satellite missions. In this work, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance.
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