Multilagenbasierte Transmissionsoptiken für die Röntgenmikroskopie

Abstract

Microscopy in the x-ray regime (0,001 – 10 nm wavelength) is a well-established method filling the gap between light and electron microscopy. Focusing of x-rays using transmission optics like zone plates, spatial resolutions in the range of 10 nm were already experimentally reached. Nevertheless, fabricating high resolution and also efficient optics, high aspect ratios (between zone height and zone width) are needed. Hence, promising alternatives are one- or two-dimensional multilayer based transmission optics namely multilayer Laue lenses (line focus) and multilayer zone plates (point focus). This dissertation deals with the development and optimization of a novel fabrication method of such multilayer based transmission optics for soft (0,5 – 6 nm) and hard x-rays (< 0,5 nm), which involves the combination of pulsed laser deposition and focused ion beam technique. For this purpose, the main focus is placed on an elementary understanding of specific layer growth and real interface properties of appropriate material systems as well as a straightforward fabrication process of suitable devices without any defects. This innovative method establishes new physical and technological paths to highly focus both soft and hard x-rays with a spatial resolution below 10 nm.